there is a delay with getting the system on its wheels for movement into the fab...it looks likely to still happen today, but definitely not 1:30-2:30 window originally indicated.
j
On Fri, Apr 9, 2010 at 5:29 AM, J Provine <jprovine@stanford.edu> wrote:
Dear labmembers,
Thursday SNF received our new Fiji ALD system from Cambridge NanoTech.
Friday around 1:30-2:30 we will move the tool into SNF through the
doors near the chemical pass through and place it in the recently
cleared space there.
This move should be brief and the fab will only be breached for a
short time, but please be aware if your are planning sensitive work
inthis area around this time.
Thank you.
J and the new equipment team
No comments:
Post a Comment