Hi,
I am trying to make a simple LED structure on silicon wafers. Could anyone please tell me if there are groups or vendors that can make a few wafers with LED materials (such as III-Vs) on top? Emission in the visible will be desirable.
Also, post processing is needed for the wafers and the tools I need are DRIE for silicon, pin-hole free LPCVD/PECVD oxide (to coat and protect my structures for XeF2 etch in a later step), oxide etcher, metal sputtering, and metal etcher. I assume that all LED materials will be considered gold contaminated. I was told that Santa Barbara has contaminated DRIE. I tried searching the NNIN sites but they don't have the cleanliness category listed on the website. Could anyone please also let me know if there are any places or vendors that can provide these services/tools?
Thanks.
Kevin
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Kevin Huang
Ph.D. Candidate
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang@stanford.edu
Phone: (650) 725-6924
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