photo resist pretreatment before ion implantation

Dear SNF labmembers,

 

 Could anyone give me some advice on typical photoresist pretreatment before ion implantation, please?

 For example, do I need 1) UV hardening of resist or 2) heat treatment? Any other suggestions?

 

 I plan to use ion implantation service from Innovion and use 1.6um thick SPR 3612 as a photoresist with maximum As ion energy of 180keV.

 

Thanks,

SangBum