Re: LED wafers and processing

Kevin,

You are asking for what people are currently doing research on, so there are absolutely no vendors who can supply what you are looking for.  You will have to do a great deal of the work yourself, including process development and work with one of the groups putting III-V materials onto Si, which isn't so hard, but trying to do mixed processing is literally impossible except by research groups working on mixed III-V/Si as NO ONE wants to risk contamination of any decent Si processing equipment.  I would suggest that the two best chances are at the NNUN facilities at UCSB and Cornell as they have far more III-V work and relatively little Si, so tend to already be "contaminated".  I would first look at Cornell as they not only have a lot of III-V work, but also considerable Si based MEMS activity.

Good luck,

Jim Harris

Hi,
        I am trying to make a simple LED structure on silicon wafers.  Could anyone please tell me if there are groups or vendors that can make a few wafers with LED materials (such as III-Vs) on top?  Emission in the visible will be desirable. 

       Also, post processing is needed for the wafers and the tools I need are DRIE for silicon, pin-hole free LPCVD/PECVD oxide (to coat and protect my structures for XeF2 etch in a later step), oxide etcher, metal sputtering, and metal etcher.  I assume that all LED materials will be considered gold contaminated.  I was told that Santa Barbara has contaminated DRIE.  I tried searching the NNIN sites but they don't have the cleanliness category listed on the website.  Could anyone please also let me know if there are any places or vendors that can provide these services/tools?

Thanks.

Kevin

--
==================================
Kevin Huang
Ph.D. Candidate
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang@stanford.edu
Phone: (650) 725-6924
================================== !DSPAM:480134c9123471923448402!

--  

 James S. Harris, '64
 James & Ellenor Chesebrough Professor     E-Mail:Harris@snow.stanford.edu
 Department of Electrical Engineering       http://www-ee.stanford.edu/~harris/
 420 Via Palou Mall, CIS-X Rm 328            Ph:  (650)723-9775
 Stanford, CA 94305-4075                      Fax: (650)723-4659                                    
 Adm. Asst.: Gail Chun-Creech              Ph:  (650)723-0983
 
 __   ___
   |  |
   |__|
    __ arris  Group, Solid State & Photonics Lab
 __|  |__ http://www-snow.stanford.edu/