Monday, April 19, 2010

Fwd: New Frontiers in Plasma Nanopatterning Workshop - Register Today


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Date: Mon, 19 Apr 2010 14:00:22 +1000
Subject: New Frontiers in Plasma Nanopatterning Workshop - Register Today
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The Molecular Foundry
April 12, 2010
Foundry  

July 15-16, 2010 at The Molecular Foundry of LBNL



Thursday, July 15: 8am - 5:30pm
Friday July 16: 8:30am - 12:30pm


This two-day seminar, sponsored by The Molecular Foundry and Oxford Instruments Plasma Technology is free of charge, but must be booked in advance as spaces are limited. Click here to book your place.

View the preliminary program.

Presentations by key speakers include:
      • The future of nanoelectronics
      • ALD in solar cells and direct-write patterning
      • Pt ALD
      • Inorganic resists for high speed, high resolution patterning
      • Advanced plasma diagnostics and links to on-wafer performance

Workshops and classes include:
      • Intros to ALD/PECVD, Plasma diagnostics, and Nanofabrication & etching
      • Plasma based etching and atomic layer deposition
      • Nanofab tour

There will also be tours of The Molecular Foundry, a poster session, and a Process Helpdesk, at which Oxford Instruments process experts will be on hand to answer any specific Process Application questions.

Register today to reserve your seat. Space is limited, so early booking is advisable.
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